Engineering · Materials Science · Physics and Astronomy
| ISSN | 19325134, 19325150 |
|---|---|
| Country | United States |
| Publisher | S P I E - International Society for Optical Engineering |
| Subject Areas | Engineering · Materials Science · Physics and Astronomy |
| Publication Type | Journals |
| Active Years | 2007-ongoing |
| Competitiveness | 1. (0-20) Least Competitive |
| Publication Time | 2. Quick (1-3 months) |
| Website | Visit journal |
| JIF 2022–2023 | 1.500 |
| 2019-2020 SCR Rank | 7517 |
| 2020-2021 SCR Rank | 10274 |
The Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3) (formerly the Journal of Microlithography, Microfabrication, and Microsystems, 2002–2006) publishes peer-reviewed papers on the development of lithographic, fabrication, packaging, and integration technologies necessary to address the needs of the electronics, micro-optoelectromechanical systems, and photonics industries.
| Year | 2-Year IF | 3-Year IF | 4-Year IF |
|---|---|---|---|
| 2023 | 1.779 | 1.861 | 1.784 |
| 2022 | 1.656 | 1.444 | 1.421 |
| 2021 | 1.438 | 1.467 | 1.450 |
| 2020 | 1.388 | 1.382 | 1.194 |
| 2019 | 1.664 | 1.371 | 1.236 |
| 2018 | 1.233 | 1.265 | 1.155 |
| 2017 | 1.407 | 1.302 | 1.286 |
| 2016 | 1.458 | 1.442 | 1.460 |
| 2015 | 1.556 | 1.525 | 1.388 |
| 2014 | 1.471 | — | — |
| 2013 | 1.325 | — | — |
| 2012 | 1.213 | — | — |
| 2011 | 1.186 | — | — |
| 2010 | 1.247 | — | — |
| 2009 | 1.007 | — | — |
| 2008 | 1.145 | — | — |
| 2007 | 1.000 | — | — |
| 2006 | 1.365 | — | — |
| 2005 | 1.540 | — | — |
| 2004 | 1.893 | — | — |
| 2003 | 1.147 | — | — |
Note: impact factor data for reference only.
SJR measures scientific influence, weighting citations by the prestige of the citing journal.
| Year | SJR Score |
|---|---|
| 2023 | 0.393 |
| 2022 | 0.298 |
| 2021 | 0.368 |
| 2020 | 0.394 |
| 2019 | 0.389 |
| 2018 | 0.336 |
| 2017 | 0.379 |
| 2016 | 0.372 |
| 2015 | 0.426 |
The H-Index measures both the productivity and citation impact of a journal's publications.
| Year | H-Index |
|---|---|
| 2023 | 45.000 |
| 2022 | 44.000 |
| 2021 | 43.000 |
| 2020 | 42.000 |