Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics

Chemical Engineering · Engineering · Materials Science

Impact Factor
1.395
2023
H-Index
124.000
2023
SJR
0.328
2023

I. Journal Information

ISSN21662746, 21662754
CountryUnited States
PublisherAVS Science and Technology Society
Subject AreasChemical Engineering · Engineering · Materials Science
Publication TypeJournals
Active Years1991-1992, 2009-ongoing
JIF 2022–20231.500

II. Impact Factor History

Year2-Year IF3-Year IF4-Year IF
20231.3951.4171.412
20221.5091.5441.489
20211.6241.6381.583
20201.5261.5401.456
20191.6551.5041.391
20181.4581.3581.387
20171.4741.5601.480
20161.7381.6331.553
20151.5831.5441.373
20141.614
20131.531
20121.408
20111.529
20101.494
20091.719
20081.585
20071.642
20061.885
20051.851
20041.753
20031.742
20021.719
20011.729
20001.516

Note: impact factor data for reference only.

III. SCImago Journal Rank (SJR)

SJR measures scientific influence, weighting citations by the prestige of the citing journal.

YearSJR Score
20230.328
20220.400
20210.420
20200.429
20190.403
20180.465
20170.467
20160.595
20150.533

IV. H-Index

The H-Index measures both the productivity and citation impact of a journal's publications.

YearH-Index
2023124.000
2022122.000
2021120.000
2020119.000